A Method for Area Saving Planar Isolation Oxides Using Oxidation Protected Sidewalls

D. Kahng, T. A. Shankoff, T. T. Sheng, S. E. Haszko

DOI: 10.1149/1.2129498

Journal of The Electrochemical Society

Data up to Jan 2025

Published1980

Citations22

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Materials science Computer science Geology Philosophy Biology Optoelectronics Nanotechnology Metallurgy

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