NANOLITHOGRAPHY: A Borderland between STM, EB, IB, and X-Ray Lithographies

M. Gentili, Carlo Giovannella, S. Selci

DOI: 10.1007/978-94-015-8261-2

Springer eBooks

Data up to Jan 2025

Published1994

Citations32

References0

Fields

Materials science Physics Medicine Nanotechnology Optics Quantum mechanics

Total Citations Per Year

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