Hydrogen in crystalline semiconductors

Structural interpretation of the vibrational spectra of<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"><mml:mi>a</mml:mi></mml:math>-Si: H alloys

1979 • 798 citations

On the permeation of hydrogen and helium in single crystal silicon and germanium at elevated temperatures

1956 • 591 citations

Neutralization of Shallow Acceptor Levels in Silicon by Atomic Hydrogen

1983 • 455 citations

Defects in single-crystal silicon induced by hydrogenation

1987 • 448 citations

Recombination enhanced defect reactions

1978 • 415 citations

Interstitial hydrogen and neutralization of shallow-donor impurities in single-crystal silicon

1986 • 395 citations

Deactivation of the boron acceptor in silicon by hydrogen

1983 • 320 citations

Hydrogen localization near boron in silicon

1985 • 290 citations

Mechanism for hydrogen compensation of shallow-acceptor impurities in single-crystal silicon

1985 • 239 citations

Neutralization of acceptors in silicon by atomic hydrogen

1984 • 219 citations

Donor-hydrogen complexes in passivated silicon

1988 • 215 citations

Dissociation energies of shallow-acceptor-hydrogen pairs in silicon

1989 • 193 citations

Hydrogen passivation of shallow-acceptor impurities inp-type GaAs

1986 • 188 citations

Hydrogenation of shallow-donor levels in GaAs

1986 • 174 citations

Hydrogen-acceptor pairs in silicon: Pairing effect on the hydrogen vibrational frequency

1985 • 168 citations

Defects in Semiconductors 14

1986 • 158 citations

Field drift of the hydrogen-related, acceptor-neutralizing defect in diodes from hydrogenated silicon

1985 • 152 citations

Real-time observations of hydrogen drift and diffusion in silicon

1988 • 122 citations

Negative-charge state of hydrogen in silicon

1990 • 117 citations

Passivation of the dominant deep level (EL2) in GaAs by hydrogen

1982 • 111 citations

Vibrational spectroscopy of acceptor-hydrogen complexes in silicon: Evidence for low-frequency excitations

1988 • 110 citations

Hydrogen Motion in Defect Complexes: Reorientation Kinetics of the B-H Complex in Silicon

1988 • 105 citations

Electron paramagnetic resonance of hydrogen in silicon

1991 • 102 citations

Lattice Location of Deuterium Interacting with the Boron Acceptor in Silicon

1988 • 100 citations

High-resolution infrared study of the neutralization of silicon donors in gallium arsenide

1988 • 96 citations

Evidence for complexes of hydrogen with deep-level defects in bulk III-V materials

1987 • 95 citations

Passivation of Si donors and D X centers in AlGaAs by hydrogen plasma exposure

1987 • 94 citations

Structure of the boron-hydrogen complex in crystalline silicon

1987 • 87 citations

Evidence for the existence of a negatively charged hydrogen species in plasma-treated n-type Si

1990 • 86 citations

Hydrogen passivation of acceptors in p-InP

1989 • 82 citations

Charge-state-dependent hydrogen-carbon-related deep donor in crystalline silicon

1989 • 80 citations

Hydrogen diffusion in crystalline semiconductors

1991 • 77 citations

Hydrogen immobilization in silicon<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"><mml:mi>p</mml:mi><mml:mo>−</mml:mo><mml:mi>n</mml:mi></mml:math>junctions

1988 • 74 citations

Trap-limited hydrogen diffusion in doped silicon

1990 • 71 citations

Hydrogenation and annealing kinetics of group-III acceptors in oxidized silicon

1985 • 69 citations

Injection and drift of a positively charged hydrogen species in p-type GaAs

1990 • 69 citations

Spectroscopic evidence for the hydrogen passivation of zinc acceptors in gallium arsenide

1987 • 57 citations

Structure and dynamics of the Be-H complex in GaAs

1989 • 54 citations

Microscopic structure of boron-hydrogen complexes in crystalline silicon

1988 • 52 citations

Theoretical aspects of hydrogen in crystalline semiconductors

1991 • 49 citations

Spectroscopic evidence for hydrogen-phosphorus pairing in zinc-doped InP containing hydrogen

1989 • 49 citations

Hydrogen Implantation into Silicon. Infra-Red Absorption Spectra and Electrical Properties

1985 • 48 citations

Experimental evidence for boron-hydrogen interaction in boron-doped silicon passivated with hydrogen

1988 • 47 citations

Hydrogen in III–V Semiconductors

1987 • 45 citations

Creation of deep levels in horizontal Bridgman-grown GaAs by hydrogenation

1988 • 42 citations

Nuclear magnetic resonance investigation of H, H2 and dopants in hydrogenated amorphous silicon and related materials

1991 • 34 citations

Vibrational properties of hydrogen in compound semiconductors

1991 • 34 citations

Hydrogen passivation of a substitutional sulfur defect in silicon

1988 • 33 citations

Damage to shallow n+/p and p+/n junctions by CHF3+CO2 reactive ion etching

1988 • 30 citations

Analysis of transmission electron microscopy images of hydrogen platelets in proton-bombarded GaAs

1988 • 28 citations

Reversible light-induced reactivation of acceptors in p-type hydrogenated GaAs

1989 • 23 citations

Interactions Between Hydrogen and Silicon Acceptors in p-Type GaAs:Si

1987 • 21 citations

Photoluminescence of Defects Produced by Reactive Ion Etching of Silicon

1986 • 19 citations

Sn-H Complex in Hydrogen Pass Ivated GaAs

1989 • 18 citations

Johnson, Herring, and Chadi reply

1987 • 18 citations

Temperature dependence of hydrogen vibrational modes in passivated boron-doped silicon

1987 • 17 citations

The formation of microsplits and damage rafts in proton-bombarded GaAs

1988 • 15 citations

Identification of Microdefects Induced in Si after Hydrogen and Helium Plasma Treatments

1989 • 14 citations

Hydrogen in crystalline and amorphous silicon

1991 • 13 citations

Hydrogen neutralization and reactivation of chalcogen double-donor centers in silicon

1990 • 12 citations

Theory of hydrogen-impurity complexes in semiconductors

1991 • 12 citations

Investigation of hydrogen in semiconductors by nuclear techniques

1991 • 11 citations

Structure and reorientation kinetics of hydrogen passivated shallow impurities in silicon from vibrational spectroscopy

1991 • 10 citations

Electronic properties of hydrogen-related complexes in pure semiconductors

1991 • 10 citations

Analysis of Real-Time Hydrogenation data from P and N-Type Silicon

1989 • 7 citations

Hydrogen Neutralization of Shallow-Donor Impurities in Single-Crystal Silicon

1987 • 6 citations

Hydrogen-Induced Defects in Silicon by CF₄/x% H₂ (0≤x≤ 100) RIE and H₂ Plasma

1987 • 6 citations

Electronic structure, dynamics, and metastability of muonium in semiconductors

1991 • 6 citations

Fermi Resonance Effects on the Vibration Modes of Hydrogen-Passivated Boron in Silicon

1989 • 5 citations

Thermal Stability of Acceptor-Hydrogen Pairs in Silicon

1989 • 5 citations

Theory of H sites in undoped crystalline semiconductors

1991 • 5 citations

Raman Studies of Hydrogen Passivation in Silicon

1987 • 4 citations

Passivation of Zn-Acceptors in InGaAs During Rie with CHF₃/H₂ and CH₄/H₂

1989 • 2 citations

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