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Hard diamondlike carbon films deposited by ionized deposition of methane gas

Toshio Mōri, Yoshikatsu Namba
DOI: 10.1116/1.572304
Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

Data up to Jan 2025

Published1983
Citations105
References0
Fields
Materials scienceChemistryGeologyPhysicsEngineeringComputer scienceChemical engineeringNanotechnologyComposite material

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