Characteristics of the Surface-State Charge (Qss) of Thermally Oxidized Silicon

B. E. Deal, Michael C. Sklar, Andrew S. Grove, E. H. Snow

DOI: 10.1149/1.2426565

Journal of The Electrochemical Society

Data up to Jan 2025

Published1967

Citations697

References2

Fields

Materials science Chemistry Physics Engineering Chemical physics Chemical engineering Nanotechnology

Total Citations Per Year

Abstract

References (2)

Multiple-beam interferometry of surfaces and films

1948 • 741 citations

A Nitric Oxide Process for the Deposition of Silica Films

1967 • 12 citations

Cited By (0)

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