Effect of Water Vapor on the Oxidation of Hot‐Pressed Silicon Nitride and Silicon Carbide

Subhash C. Singhal

DOI: 10.1111/j.1151-2916.1976.tb09398.x

Journal of the American Ceramic Society

Data up to Jan 2025

Published1976

Citations110

References4

Fields

Materials science Engineering Sociology Engineering physics Metallurgy Social science

Total Citations Per Year

Abstract

References (4)

General Relationship for the Thermal Oxidation of Silicon

1965 • 3,245 citations

Oxidation of Silicon Carbide

1959 • 161 citations

The Oxidation of Silicon in Dry Oxygen, Wet Oxygen, and Steam

1963 • 118 citations

The formation and devitrification of oxides on silicon

1966 • 90 citations

Cited By (0)

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