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Holographic interference lithography for integrated optics

Data up to Jan 2025

Published1978
Citations65
References24

Total Citations Per Year

Abstract

References (24)

Coupled-mode theory for guided-wave optics

1973 • 1,852 citations

Integrated optics and new wave phenomena in optical waveguides

1977 • 556 citations

Periodic structures for integrated optics

1977 • 336 citations

GaAs-AlxGa1-xAs injection lasers with distributed Bragg reflectors

1975 • 149 citations

Room-temperature operation of low-threshold separate-confinement heterostructure injection laser with distributed feedback

1975 • 102 citations

Generation of periodic surface corrugations

1978 • 89 citations

Frequency multiplexing light source with monolithically integrated distributed-feedback diode lasers

1976 • 86 citations

GaAs–Ga1−xAlxAs double-heterostructure distributed-feedback diode lasers

1974 • 85 citations

Chirped gratings in integrated optics

1977 • 81 citations

Chirped-grating demultiplexers in dielectric waveguides

1977 • 78 citations

High-efficiency blazed grating couplers

1976 • 75 citations

GaAs-GaAlAs distributed-feedback diode lasers with separate optical and carrier confinement

1975 • 73 citations

GaAs-Ga1-xAlxAs double-heterostructure injection lasers with distributed Bragg reflectors

1976 • 59 citations

Method of forming novel curved-line gratings and their use as reflectors and resonators in integrated optics

1977 • 39 citations

Dry processing of high resolution and high aspect ratio structures in GaAs-AlxGa_1−xAs for integrated optics

1977 • 36 citations

Profile and groove-depth control in GaAs diffraction gratings fabricated by preferential chemical etching in H2SO4-H2O2-H2O system

1976 • 35 citations

Simultaneous exposure and development technique for making gratings on positive photoresist

1974 • 34 citations

Room-temperature operation of GaAs Bragg-mirror lasers

1976 • 29 citations

Fabrication of grating structures with variable period

1977 • 25 citations

Highly collimated broadside emission from room-temperature GaAs distributed Bragg reflector lasers

1977 • 25 citations

Liquid phase epitaxy of GaAlAs on GaAs substrates with fine surface corrugations

1974 • 24 citations

A new C-MOS technology using anisotropic etching of silicon

1975 • 14 citations

Theoretical modeling of the simultaneous exposure and development (SED) process of a positive photoresist

1977 • 12 citations

The influence of crystal orientation on silicon semiconductor processing

1970 • 3 citations

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Holographic interference lithography for integrated optics (1978) – IEEE Transactions on Electron Devices | Metascience Observatory Explorer