Reaction mechanisms for the photon-enhanced etching of semiconductors: An investigation of the UV-stimulated interaction of chlorine with Si(100)

Thermal desorption of gases

1962 • 3,405 citations

Laser-induced gas-surface interactions

1983 • 413 citations

Surface processes in plasma-assisted etching environments

1983 • 260 citations

Adsorption-desorption properties and surface structural chemistry of chlorine on Cu(111) and Ag(111)

1977 • 237 citations

Laser chemical technique for rapid direct writing of surface relief in silicon

1981 • 156 citations

Laser Microchemistry and its Application to Electron-Device Fabrication

1983 • 146 citations

Laser-enhanced gas–surface chemistry: Basic processes and applications

1982 • 118 citations

Photoeffects on the fluorination of silicon. I. Influence of doping on steady-state phenomena

1983 • 88 citations

Chlorine reactions on the Si (111) surface

1969 • 82 citations

Chemical relaxation molecular beam studies of reactive gas-solid scattering

1971 • 82 citations

Photoeffects on the fluorination of silicon. II. Kinetics of the initial response to light

1984 • 64 citations

Photon-assisted dry etching of GaAs

1984 • 52 citations

Chemisorptive emission and luminescence

1983 • 46 citations

Chemisorption and epitaxial growth: structural and kinetic studies of halogen interactions with vanadium and chromium surfaces

1983 • 11 citations