Reactive plasma cleaning of metals

Handbook of Chemistry and Physics.

1973 • 2,298 citations

Handbook of Chemistry

1944 • 1,609 citations

Aerospace structural metals handbook

1995 • 305 citations

Clean Surfaces: Their Preparation and Characterization for Interfacial Studies

1970 • 279 citations

Soft x-ray appearance potential spectroscopy

1974 • 153 citations

In situ investigation of substrate surface recontamination during glow‐discharge sputter cleaning

1976 • 8 citations

Abstract: Plasma etching of thin metal and dielectric films

1976 • 4 citations

Surface Cleaning in Thin Film Technology

1979 • 2 citations