Hydrogen implantation in silicon between 1.5 and 60 kev
Data up to Jan 2025
Total Citations Per Year
Abstract
References (26)
Microanalysis by the direct observation of nuclear reactions using a 2 MeV Van de Graaff
1971 • 442 citations
Applications of Ion Beams to Metals
1974 • 433 citations
Stopping power of energetic helium ions transmitted through thin silicon crystals in channelling and random directions
1972 • 149 citations
Nondestructive Analysis for Trace Amounts of Hydrogen
1972 • 146 citations
A technique for measuring hydrogen concentration versus depth in solid samples
1973 • 133 citations
Identification of the dominant diffusing species in silicide formation
1974 • 125 citations
Sputtering and backscattering of keV light ions bombarding random targets
1973 • 123 citations
Depth profiling of<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"><mml:mrow><mml:mmultiscripts><mml:mrow><mml:mi mathvariant="normal">He</mml:mi></mml:mrow><mml:mprescripts /><mml:mrow /><mml:mrow><mml:mn>3</mml:mn></mml:mrow><mml:mrow /><mml:mrow /></mml:mmultiscripts></mml:mrow></mml:math>and<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"><mml:mrow><mml:mmultiscripts><mml:mrow><mml:mi mathvariant="normal">H</mml:mi></mml:mrow><mml:…
1974 • 79 citations
Electrical properties of n-type Si layers doped with proton bombardment induced shallow donors
1972 • 76 citations
A gas-release study of the annealing of bombardment-induced disorder∗ (studies on bombardment-induced disorder—I)
1969 • 67 citations
A NEW utilization of11B ion beams: Hydrogen analysis by1H11B,α)α α nuclear reaction
1974 • 65 citations
EPR of conduction electrons produced in silicon by hydrogen ion implantation
1974 • 58 citations
Location of interstitial deuterium sites in niobium by channeling
1972 • 49 citations
Spatial distribution of defects in ion bombarded silicon and germanium
1971 • 44 citations
Redistribution of boron in silicon after high−temperature proton irradiation
1975 • 39 citations
On conversion from an energy scale to a depth scale in channelling experiments
1973 • 37 citations
Ion bombardment induced phase transformations and inert gas mobility in the semiconductors Ge, Si, and GaAs
1970 • 37 citations
Transmission energy loss of light channeled particles in thin silicon crystals
1972 • 35 citations
Random stopping power for protons in silicon
1972 • 23 citations
Spectres de diffusion Raman du monocristal de thiourée dans les phases para-et ferroélectrique constantes de forces intermoléculaires
1973 • 19 citations
Non-destructive measurement of hydrogen in thin sheet materials
1974 • 15 citations
Mesure des variations du nombre moyen ν de neutrons prompts émis lors de la fission de 239Pu induite par des neutrons de résonances
1973 • 9 citations
Energy loss and projected range of alpha particles in zinc telluride
1974 • 8 citations
Damage in the Surface Region of Silicon Produced by Sputter-Etching
1974 • 7 citations
Blistering of Niobium Due to Low Energy Helium Ion Bombardment Investigated by Rutherford Backscattering
1974 • 5 citations
Depth Distribution and Migration of Implanted Helium in Metal Foils Using Proton Backscattering
1974 • 3 citations