Investigation of the Sputtering of Silicon
Data up to Jan 2025
Total Citations Per Year
Abstract
References (13)
Structure and Adsorption Characteristics of Clean Surfaces of Germanium and Silicon
1959 • 873 citations
Ionization Potentials and Probabilities for the Formation of Multiply Charged Ions in Helium, Neon and Argon
1930 • 146 citations
Auger Electron Ejection from Germanium and Silicon by Noble Gas Ions
1960 • 83 citations
Surface Cleaning by Cathode Sputtering
1960 • 79 citations
Sputtering Thresholds and Displacement Energies
1960 • 57 citations
Displacement Thresholds in Semiconductors
1959 • 46 citations
Adsorption of Oxygen on Silicon
1959 • 36 citations
Positive-Ion Bombardment of Germanium and Silicon
1957 • 30 citations
Calorimetric determination of the heat of adsorption of oxygen on evaporated films of germanium and silicon
1960 • 30 citations
Selective Delineation of Screw Dislocations by Cathodic Sputtering
1959 • 22 citations
Sputtering of Silicon with<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"><mml:mrow><mml:msup><mml:mrow><mml:mi mathvariant="normal">A</mml:mi></mml:mrow><mml:mrow><mml:mo>+</mml:mo><mml:mn>2</mml:mn><mml:mn /></mml:mrow></mml:msup></mml:mrow></mml:math>Ions
1961 • 16 citations
Ion-Bombardment Etching of Silicon and Germanium
1960 • 12 citations
The ion bombardment, oxidation and regeneration of germanium surfaces
1960 • 8 citations