Ion beam techniques for thin and thick film deposition

Ion-Beam Deposition of Thin Films of Diamondlike Carbon

1971 • 1,134 citations

Influence of substrate temperature and deposition rate on structure of thick sputtered Cu coatings

1975 • 422 citations

Ion-beam-induced atomic mixing

1977 • 152 citations

The Effect of Substrate Temperature on the Structure of Titanium Carbide Deposited by Activated Reactive Evaporation

1972 • 100 citations

Some trends in preparing film structures by ion beam methods

1978 • 75 citations

Germanium and Silicon Film Growth by Low-Energy Ion Beam Deposition

1977 • 69 citations

Variation of superconducting transition temperatures of transition-metal thin films deposited with the noble gases

1973 • 68 citations

Thin film deposition using low-energy ion beams. I. System specification and design

1976 • 62 citations

Ion beam studies Part I: The retardation of ion beams to very low energies in an implantation accelerator

1976 • 50 citations

Structure and properties of transparent and hard carbon films

1979 • 48 citations

Ion beam sputtering and its application for the deposition of semiconducting films

1972 • 40 citations

Ion-beam etching and sputtering of polytetrafluoroethylene (PTFE)

1974 • 24 citations

Thin-film deposition using low-energy ion beams (2) Bb+ ion-beam deposition and analysis of deposits

1977 • 19 citations

The energies of ions and neutrals in ion plating

1976 • 16 citations

Thin-film deposition using low-energy ion beams (3) Mg+ ion-beam deposition and analysis of deposits

1977 • 15 citations

Fabrication of optical waveguides by ion‐beam sputtering

1976 • 14 citations

Oxide barriers on GaAs by neutralized ion-beam sputtering

1977 • 12 citations

Epitaxial growth of ZnTe on NaCl by ion deposition

1976 • 11 citations

Early growth of thin films deposited by ion‐beam sputtering

1977 • 9 citations

New Developments in Ion Beam Sputtering and Etching Techniques

1974 • 6 citations

VACUUM and thin film technology

1978 • 5 citations

Deposition of Tantalum Thin Films by Ion Beam Sputtering

1977 • 4 citations

Ionenstrahlgestäubte GaAs‐Schichten auf verschiedenen einkristalline Substraten

1975 • 2 citations