Energy dissipation in a thin polymer film by electron beam scattering
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Abstract
References (23)
Fundamentals of Statistical and Thermal Physics
1967 • 1,494 citations
Cosmic-Ray Theory
1941 • 1,007 citations
High-energy particles
1952 • 893 citations
Molière's Theory of Multiple Scattering
1953 • 837 citations
Determination of Kilovolt Electron Energy Dissipation vs Penetration Distance in Solid Materials
1971 • 786 citations
Multiple Scattering in an Infinite Medium
1950 • 461 citations
Zur Streuung mittelschneller Elektronen in kleinste Winkel
1954 • 337 citations
Back Scattering of Electrons
1961 • 282 citations
Theory of Multiple Scattering: Second Born Approximation and Corrections to Molière's Work
1959 • 263 citations
Simple Theory Concerning the Reflection of Electrons from Solids
1960 • 223 citations
High-resolution Positive Resists for Electron-beam Exposure
1968 • 178 citations
Electron scattering in thick targets
1967 • 165 citations
Monte Carlo Calculations on Electron Scattering in a Solid Target
1971 • 164 citations
A Monte Carlo calculation on the scattering of electrons in copper
1965 • 93 citations
The Monte Carlo technique as applied to the fundamentals of EPMA and SEM
1972 • 88 citations
Monte Carlo Calculations of the Electron-Sample Interactions in the Scanning Electron Microscope
1971 • 78 citations
Fundamental aspects of electron beam lithography. I. Depth-dose response of polymeric electron beam resists
1973 • 51 citations
Scattering of Highly Focused Kilovolt Electron Beams by Solids
1969 • 48 citations
A Novel Method for Fabrication of Ultrafine Metal Lines by Electron Beams
1972 • 41 citations
Microcircuits by Electron Beam
1972 • 33 citations
The application of electron/ion beam technology to microelectronics
1971 • 28 citations
The attenuation and backscattering of electron beams by thin films
1971 • 22 citations
An approximate formula for electron energy versus path length
1973 • 11 citations