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Scanning probe microscopy on the surface of Si(111)

Ernst Meyer, L. Howald, R. Lüthi, H. Haefke, M. Rüetschi
DOI: 10.1116/1.587704
Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena

Data up to Jan 2025

Published1994
Citations20
References0
Fields
Materials scienceChemistryPhysicsAtomic physicsOpticsOptoelectronics

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Scanning probe microscopy on the surface of Si(111) (1994) – Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena | Metascience Observatory Explorer