Encapsulation of a liquid-sensing microchip using SU-8 photoresist

Development of an Ion-Sensitive Solid-State Device for Neurophysiological Measurements

1970 • 1,982 citations

Biocompatibility and biofouling of MEMS drug delivery devices

2003 • 538 citations

SU-8 thick photoresist processing as a functional material for MEMS applications

2002 • 171 citations

A miniature flow-through cell with a four-function chemfet integrated circuit for simultaneous measurements of potassium, hydrogen, calcium and sodium ions

1984 • 118 citations

CMOS-based chemical microsensors

2002 • 118 citations

Long-life multiple-ISFETS with polymeric gates

1989 • 51 citations

Planar Compatible Polymer Technology for Packaging of Chemical Microsensors

1996 • 32 citations