Integrated vacuum sensor

The seebeck effect in silicon ICs

1984 • 57 citations

Thermopiles fabricated using silicon planar technology

1982 • 25 citations

A single crystal semiconductor vacuum gauge with extended range

1976 • 14 citations

Simple vacuum gauge using TaN thin films in the pressure range of 105 to 10−3 Pa

1978 • 12 citations

Use of GaSb films as residual gas pressure monitors

1981 • 6 citations

305. Extension of the range for measuring vacuum by the thermoelectrical method

1962 • 2 citations