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Measurements and Collision—Radiation Damage Theory of High-Vacuum Sputtering

Data up to Jan 2025

Published1955
Citations109
References18

Total Citations Per Year

Abstract

References (18)

On the disordering of solids by action of fast massive particles

1949 • 374 citations

Ein neues manometer für niedrige gasdrucke, insbesondere zwischen l0−3 und 10−5 mm

1937 • 184 citations

Instrumentation and Experimental Procedure for Studies of Electron Ejection by Ions and Ionization by Electron Impact

1953 • 100 citations

Kathodenzerstäubungsprobleme. (III. Mitteilung) Zur Theorie der Kathodenzerstäubung

1926 • 75 citations

The Removal of Thorium from the Surface of a Thoriated Tungsten Filament by Positive Ion Bombardment

1923 • 70 citations

“Rays of Positive Electricity.”

1922 • 55 citations

Theory of Cathode Sputtering in Low Voltage Gaseous Discharges

1944 • 53 citations

Momentum Transfer in Sputtering by Ion Bombardment

1954 • 49 citations

Bemerkung zur Theorie der Kathodenzerst�ubung

1935 • 44 citations

Threshold Energies for Sputtering and the Sound Velocity in Metals

1954 • 36 citations

Kathodenzerstäubung bei sehr geringen Gasdrücken

1930 • 29 citations

A Mechanism for Sputtering in the High Vacuum Based upon the Theory of Neutron Cooling

1952 • 23 citations

The Scattering of Positive Ions from a Platinum Surface

1928 • 20 citations

Sputtering and Secondary Electron Emission of Metals Bombarded by Argon Ions

1941 • 19 citations

VII. Cathode disintegration

1923 • 14 citations

Gibt es eine Anodenzerst�ubung?

1931 • 6 citations

The Scattering of Lithium Ions by a Polycrystalline Nickel Surface

1934 • 6 citations

Control of Gaseous Conduction

1922 • 2 citations

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