Detection of SiF radicals with multiphoton ionization spectroscopy

Plasma-Assisted Etching in Microfabrication

1983 • 79 citations

The Band Spectrum of Silicon Monofluoride, SiF

1958 • 60 citations

Etch products from the reaction of XeF2 with SiO2, Si3N4, SiC, and Si in the presence of ion bombardment

1983 • 46 citations

The a⁴Σ⁻–X²Π Electronic Transition of SiF

1973 • 37 citations

Detection of hydroxymethyl (CH2OH) radicals by resonance-enhanced multiphoton ionization spectroscopy

1983 • 35 citations

Measurement of the radiative lifetime of the<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"><mml:mrow><mml:msup><mml:mrow><mml:mi>A</mml:mi></mml:mrow><mml:mrow><mml:mn>2</mml:mn></mml:mrow></mml:msup></mml:mrow><mml:mi>Σ</mml:mi><mml:mo>(</mml:mo><mml:mrow><mml:msup><mml:mrow><mml:mi>v</mml:mi></mml:mrow><mml:mrow><mml:mo>′</mml:mo></mml:mrow></mml:msup></mml:mrow><mml:mi /><mml:mo>=</mml:mo><mml:mn>0</mml:mn><mml:mo>)</mml:mo></mml:math>state of SiF

1976 • 33 citations

Some Observations on the Spectra of the Diatomic Fluorides of Silicon, Germanium, Tin, and Lead

1959 • 27 citations

Mass spectrometric and spectroscopic study of the reaction of borane carbonyl and diborane with oxygen and nitrogen atoms

1977 • 19 citations

Multiphoton ionization of the trifluoromethyl radical

1982 • 18 citations

Selective multiphoton ionization of geometric isomers. cis- and trans-1,2-Dichloroethene

1981 • 11 citations