Alternative relationship for converting incremental sheet resistivity measurements into profiles of impurity concentration

Resistivity of Bulk Silicon and of Diffused Layers in Silicon

1962 • 688 citations

Detailed analysis of thin phosphorus-diffused layers in p-type silicon

1961 • 210 citations

Electron and hole mobilities in inversion layers on thermally oxidized silicon surfaces

1965 • 160 citations

Studies of anomalous diffusion of impurities in silicon

1966 • 70 citations

Influence of damaged surface layer on resistivity and mobility of thin semiconductor sheets

1966 • 6 citations