Calibration of the multiple quantum well probe technique for dry-etch-induced damage analysis

Investigation of reactive ion etching induced damage in GaAs–AlGaAs quantum well structures

1988 • 118 citations

Near-surface GaAs/<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"><mml:mrow><mml:msub><mml:mrow><mml:mi mathvariant="normal">Ga</mml:mi></mml:mrow><mml:mrow><mml:mn>0.7</mml:mn></mml:mrow></mml:msub></mml:mrow></mml:math><mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"><mml:mrow><mml:msub><mml:mrow><mml:mi mathvariant="normal">Al</mml:mi></mml:mrow><mml:mrow><mml:mn>0.3</mml:mn></mml:mrow></mml:msub></mml:mrow></mml:math>As quantum wells: …

1990 • 102 citations

Defect structure and intermixing of ion-implanted AlxGa1−xAs/GaAs superlattices

1986 • 88 citations

Energy dependence and depth distribution of dry etching-induced damage in III/V semiconductor heterostructures

1989 • 65 citations

Interaction of energetic ions with inhomogeneous solids

1991 • 28 citations

Nonradiative damage measured by cathodoluminescence in etched multiple quantum well GaAs/AlGaAs quantum dots

1989 • 26 citations

Al 1-X Ga x As/GaAs Superlattice Disordering By Ion-Implantation And Diffusion: A TEM Study Of Mechanisms

1987 • 6 citations