Surface charges induced by mechanical stresses in the silicon-silicon oxide interface

Hans Friedrich

doi:10.1016/0038-1101(71)90139-0

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Surface charges induced by mechanical stresses in the silicon-silicon oxide interface

Hans Friedrich

DOI: 10.1016/0038-1101(71)90139-0

Solid-State Electronics

Data up to Jan 2025

Published1971

Citations13

References4

Fields

Materials science Philosophy Composite material Optoelectronics Metallurgy

Total Citations Per Year

Abstract

References (4)

Measurement of Elastic Constants at Low Temperatures by Means of Ultrasonic Waves–Data for Silicon and Germanium Single Crystals, and for Fused Silica

1953 • 757 citations

Measurement of Strains at Si-SiO2 Interface

1966 • 394 citations

RESIDUAL STRESSES AT AN OXIDE-SILICON INTERFACE

1967 • 53 citations

Stress at the Si—SiO₂interface and its relationship to interface states

1968 • 34 citations

Cited By (0)

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