The chemical sputtering of graphite in an oxygen plasma

Collection and sputtering experiments with noble gas ions

1961 • 412 citations

Plasma cleaning of metal surfaces

1974 • 119 citations

Kathodenzerst�ubung

1926 • 62 citations

Substrate treatment and film deposition in ionized and activated gas

1975 • 36 citations

The influence of sputtering and transport mechanisms on target etching and thin film growth in rf systems—I. Target processes

1972 • 31 citations