Nanofabrication with scanning nanonozzle ‘Nanojet’

"Dip-Pen" Nanolithography

1999 • 2,993 citations

Multiple Ink Nanolithography: Toward a Multiple-Pen Nano-Plotter

1999 • 537 citations

Centimeter scale atomic force microscope imaging and lithography

1998 • 201 citations

Fountain pen nanochemistry: Atomic force control of chrome etching

1999 • 110 citations

Plasma etching of organic materials. II. Polyimide etching and passivation downstream of an O2–CF4–Ar microwave plasma

1988 • 30 citations

Effect of oxygen on fluorine-based remote plasma etching of silicon and silicon dioxide

1988 • 19 citations

Handbuch Vakuumtechnik

1997 • 18 citations

NANOJET: Nanostructuring via a downstream plasmajet

1999 • 15 citations

Progress on nanostructuring with Nanojet

2000 • 14 citations