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<title>Silicon-micromachined direct-pore filters for ultrafiltration</title>

Wen Chu, T. Huen, Jay K. Tu, Mauro Ferrari
DOI: 10.1117/12.269961
Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

Data up to Jan 2025

Published1997
Citations18
References0
Fields
Materials scienceChemistryMathematicsEngineeringOptoelectronicsChromatographyElectrical engineering

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<title>Silicon-micromachined direct-pore filters for ultrafiltration</title> (1997) – Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE | Metascience Observatory Explorer