Real color cathodoluminescence scanning electron microscopy—A new effective method for study of SiC materials and devices

Site effect on the impurity levels in<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"><mml:mn>4</mml:mn><mml:mi>H</mml:mi></mml:math>,<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"><mml:mn>6</mml:mn><mml:mi>H</mml:mi></mml:math>, and<mml:math xmlns:mml="http://www.w3.org/1998/Math/MathML" display="inline"><mml:mn>1</mml:mn><mml:mn>5</mml:mn><mml:mi>R</mml:mi></mml:math>SiC

1980 • 322 citations

Electrical and optical characterization of SiC

1993 • 293 citations

Point defects in silicon carbide

1993 • 144 citations

Energy dependence of electron damage and displacement threshold energy in 6H silicon carbide

1991 • 124 citations

Progress in controlling the growth of polytypic crystals

1983 • 117 citations

Blue LEDs, UV photodiodes and high-temperature rectifiers in 6H-SiC

1993 • 116 citations

Epitaxial growth of silicon carbide layers by sublimation „sandwich method”︁ (I) growth kinetics in vacuum

1979 • 109 citations

Growth of improved quality 3C-SiC films on 6H-SiC substrates

1990 • 53 citations

Effect of crystallographic orientation on the polytype stabilization and transformation of silicon carbide

1979 • 42 citations

Doping Peculiarities of SiC Epitaxial Layers Grown by the Sublimation “Sandwich Method”

1992 • 40 citations

Growth of silicon carbide by chemical vapour deposition

1991 • 39 citations

Colour display of video information in scanning electron microscopy: Principles and applications to physics, geology, soil science, biology, and medicine

1988 • 38 citations

Single crystal growth of hexagonal SiC on cubic SiC by intentional polytype control

1990 • 21 citations

Silicon carbide doped with gallium

1976 • 20 citations

Polytype transformations in SiC‐epitaxial layers: The color cathodoluminescence‐sem studies

1994 • 13 citations

The Effects of Impurities on Mass Transport and the Growth Mechanism of SiC Epitaxial Layers Grown by Sublimation

1992 • 8 citations

TEM Investigation of Radiation Defects in SiC Crystals

1993 • 6 citations

Space heterogeneity of luminescent centers in SiC‐epitaxial layers detected by the color CL‐SEM

1992 • 3 citations

Deleted Work

1955 • 0 citations

Cited By (0)

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