Production mechanism and reactivity of the SiH radical in a silane plasma

Bond dissociation energy values in silicon-containing compounds and some of their implications

1981 • 804 citations

Amorphous silicon solar cells

1977 • 269 citations

Doped amorphous semiconductors

1977 • 229 citations

Dissociation of methane by electron impact

1975 • 165 citations

Dissociation cross sections of silane and disilane by electron impact

1982 • 160 citations

Kinetics of CH radical reactions with selected molecules at room temperature

1981 • 150 citations

ESR of Free Radicals Trapped in Inert Matrices at Low Temperature: CH3, SiH3, GeH3, and SnH3

1966 • 141 citations

Rate constants for the reactions of hydrogen atoms with some silanes and germanes

1977 • 134 citations

Dissociative excitation of SiH4, SiD4, Si2H6 and GeH4 by 0–100 eV electron impact

1983 • 115 citations

Origin of emitting species in the plasma deposition of a-Si:H alloys

1981 • 109 citations

Emission cross sections from fragments produced by electron impact on silane

1982 • 107 citations

Laser diagnostics of plasma etching: Measurement of Cl+2 in a chlorine discharge

1982 • 104 citations

High resolution absorption and emission spectroscopy of a silane plasma in the 1800–2300 cm−1 range

1982 • 101 citations

Flash Photolysis of Methane in the Vacuum Ultraviolet. II. Absolute Rate Constants for Reactions of CH with Methane, Hydrogen, and Nitrogen

1967 • 96 citations

Silane dissociation mechanisms and thin film formation in a low pressure multipole dc discharge

1980 • 82 citations

Ionic species in a silane plasma

1980 • 76 citations

Lifetime measurements on electronically excited Ch(A2Δ) radicals

1980 • 75 citations

A study of the silane glow discharge deposition by isotopic labelling

1981 • 73 citations

Plasma spectroscopy control and analysis of a-Si:H deposition

1980 • 71 citations

THE SPECTRUM OF SILICON HYDRIDE

1957 • 68 citations

Kinetics of the thermal decomposition of methyldisilane and trisilane

1975 • 59 citations

Novel effects of magnetic field on the silane glow discharge

1980 • 58 citations

Molecular dissociation by electron impact: High Rydberg fragments from methane, ethylene, and ethane

1977 • 58 citations

Energy transfer as a function of collision energy. IV. State-to-state cross sections for rotational-to-translational energy transfer in HF+Ne, Ar, and Kr

1982 • 54 citations

Laser-induced fluorescence of the BO and BO2 free radicals

1980 • 46 citations

Kinetic study of the heterogeneous Si/H system under low-pressure plasma conditions by means of mass spectrometry

1982 • 43 citations

Detection of Neutral Species in Silane Plasma Using Coherent Anti-Stokes Raman Spectroscopy

1983 • 39 citations

Collision transfers between BH, A 1Π, v′ = 0 rotational states, induced by He, Ar, or H2 : Experiments

1982 • 32 citations

The true potential energy curves and Franck-Condon factors of SiH and SiH+ molecules

1971 • 22 citations

Emission spectroscopy of glow-discharge and sputtering plasmas used in amorphous Si:H film deposition

1980 • 15 citations

Rotational dependence of Franck-Condon factors for OH+, NH+, SiH, MgH+, SiH+, and NO+

1982 • 7 citations