Error analysis of angle of incidence measurements
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Abstract
References (7)
An Algorithm for Least-Squares Estimation of Nonlinear Parameters
1963 • 29,357 citations
Measurement of the thickness and refractive index of very thin films and the optical properties of surfaces by ellipsometry
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Ellipsometer Study of Anomalous Absorption in Very Thin Dielectric Films on Evaporated Metals*
1966 • 22 citations
Ionic Conductivity, Dielectric Constant, and Optical Properties of Anodic Oxide Films on Two Types of Sputtered Tantalum Films
1966 • 19 citations
The accuracy of the measurement of the ellipsometric parameters Δ and ψ
1969 • 18 citations
Sources of error in ellipsometry
1969 • 13 citations
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