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Marker studies of silicide formation, silicon self-diffusion and silicon epitaxy using radioactive silicon and Rutherford backscattering

R. Pretoriüs, Chuck Ramiller, M−A. Nicolet
DOI: 10.1016/0029-554x(78)90941-2
Nuclear Instruments and Methods

Data up to Jan 2025

Published1978
Citations59
References4
Fields
Materials scienceChemistryPhysicsRadiochemistryCrystallographyNanotechnology

Total Citations Per Year

Abstract

References (4)

Radioactive silicon as a marker in thin-film silicide formation

1977 • 52 citations

Dissociation mechanism for solid-phase epitaxy of silicon in the Si 〈100〉/Pd2Si/Si (amorphous) system

1976 • 23 citations

Kinetics of the Initial Stage of Si Transport Through Pd‐Silicide for Epitaxial Growth

1975 • 20 citations

Growth mechanism for solid-phase epitaxy of Si in the Si 〈100〉/Pd2Si/Si(amorphous) system studied by a radioactive tracer technique

1977 • 13 citations

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