Preparation of hard coatings by ion beam methods

Thin Film Phenomena

1970 • 2,023 citations

Ion-Beam Deposition of Thin Films of Diamondlike Carbon

1971 • 1,134 citations

Influence of substrate temperature and deposition rate on structure of thick sputtered Cu coatings

1975 • 422 citations

Activated Reactive Evaporation Process for High Rate Deposition of Compounds

1972 • 192 citations

The deposition of hard surface layers by hydrocarbon cracking in a glow discharge

1976 • 155 citations

Ion-beam-induced atomic mixing

1977 • 152 citations

Surface stresses in ion−implanted steel

1975 • 91 citations

Reactive film preparation

1976 • 80 citations

Formation of Fe3N, Fe4N and Fe16N2 on the surface of iron

1975 • 79 citations

Some trends in preparing film structures by ion beam methods

1978 • 75 citations

Mechanical properties of hard carbon films

1979 • 70 citations

Germanium and Silicon Film Growth by Low-Energy Ion Beam Deposition

1977 • 69 citations

Plasma preparations of amorphous silicon films

1978 • 65 citations

Characterization of hard carbon films by electron energy loss spectrometry

1979 • 55 citations

Use of the ring gap plasmatron for high rate sputtering

1977 • 47 citations

Ion beam nitriding of iron

1979 • 6 citations

VACUUM and thin film technology

1978 • 5 citations

Location

1979 • 2 citations