Scanning Probe Lithography Using a Trimethylsilyl Organosilane Monolayer Resist

Modification of hydrogen-passivated silicon by a scanning tunneling microscope operating in air

1990 • 725 citations

Deep UV Photochemistry of Chemisorbed Monolayers: Patterned Coplanar Molecular Assemblies

1991 • 487 citations

Imaging and etching of self-assembled n-octadecanethiol layers on gold with the scanning tunneling microscope

1992 • 168 citations

Reaction of hexamethyldisilazane with silica

1971 • 167 citations

Lithography with the scanning tunneling microscope

1986 • 152 citations

Scanning probe lithography. 1. Scanning tunneling microscope induced lithography of self-assembled n-alkanethiol monolayer resists

1993 • 142 citations

Self-assembled monolayer electron beam resist on GaAs

1993 • 135 citations

Self-assembled monolayer electron-beam resists on GaAs and SiO2

1993 • 129 citations

Lift-off metallization using poly(methyl methacrylate) exposed with a scanning tunneling microscope

1988 • 119 citations

Scanning Tunneling Microscope Tip-Induced Anodization for Nanofabrication of Titanium

1994 • 112 citations

Low voltage electron beam lithography in self-assembled ultrathin films with the scanning tunneling microscope

1994 • 111 citations

Tip-induced anodization of titanium surfaces by scanning tunneling microscopy: A humidity effect on nanolithography

1993 • 109 citations

Electron beam lithography with monolayers of alkylthiols and alkylsiloxanes

1994 • 95 citations

Spatially Resolved Mineral Deposition on Patterned Self-Assembled Monolayers

1994 • 95 citations

Degradation of a Trimethylsilyl Monolayer on Silicon Substrates Induced by Scanning Probe Anodization

1995 • 71 citations

Electron-beam lithography with the scanning tunneling microscope

1992 • 70 citations

Exposure of calcium fluoride resist with the scanning tunneling microscope

1987 • 65 citations

Patterning of self-assembled alkanethiol monolayers on silver by microfocus ion and electron beam bombardment

1994 • 56 citations

Fabrication of GaAs nanostructures with a scanning tunneling microscope

1993 • 51 citations

Submicrometer lithographic patterning of thin gold films with a scanning tunneling microscope

1993 • 48 citations

Nanometer lithography on silicon and hydrogenated amorphous silicon with low energy electrons

1995 • 48 citations

Deep ultraviolet patterning of monolayer films for high resolution lithography

1991 • 44 citations

Low-voltage electron beam lithography with a scanning tunneling microscope

1990 • 41 citations

Scanning tunneling microscope tip-induced anodization of titanium: Characterization of the modified surface and application to the metal resist process for nanolithography

1994 • 40 citations

Proximal probe study of self-assembled monolayer resist materials

1994 • 39 citations

Maskless patterning of silicon surface based on scanning tunneling microscope tip-induced anodization and chemical etching

1994 • 35 citations

Nanometer Modifications of Non-Conductive Materials Using Resist-Films by Atomic Force Microscopy

1995 • 35 citations

Thin Hydrocarbon and Water Films on Bare and Methylated Silica: Vapor Adsorption, Wettability, Adhesion, and Surface Forces

1995 • 33 citations

Nanometer scale patterning of a monolayer Langmuir–Blodgett film with a scanning tunneling microscope in air

1993 • 30 citations

Fabrication of silicon nanostructures through scanning probe anodization followed by chemical etching

1995 • 24 citations

Deep Ultraviolet Lithography of Monolayer Films with Selective Electroless Metallization

1992 • 23 citations

Scanning tunneling microscope coaxially arranged with an optical microscope

1992 • 7 citations