Organometallic chemical vapor deposition of III/V compound semiconductors with novel organometallic precursors

Alan H. Cowley, Brian L. Benac, John G. Ekerdt, Kenneth B. Kidd, James Y. Lee

DOI: 10.1021/ja00226a051

Journal of the American Chemical Society

Data up to Jan 2025

Published1988

Citations64

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Computer science Chemistry Materials science Library science Nanotechnology Organic chemistry

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