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Thermal Oxidation of Silicon

Norio Karube, Kakuji Yamamoto, Masahide Kamiyama
DOI: 10.1143/jjap.2.11
Japanese Journal of Applied Physics

Data up to Jan 2025

Published1963
Citations13
References6
Fields
Materials scienceChemistryPhysicsEngineeringChemical engineeringMetallurgyOptics

Total Citations Per Year

Abstract

References (6)

Infrared Absorption and Oxygen Content in Silicon and Germanium

1956 • 402 citations

The theory of the formation of protective oxide films on metals, II

1940 • 159 citations

The mechanisms for silicon oxidation in steam and oxygen

1960 • 115 citations

Investigation of Oxidation of Copper by Use of Radioactive Cu Tracer

1946 • 108 citations

Effect of Oxide Layers on the Diffusion of Phosphorus into Silicon

1960 • 27 citations

Differential thermal analysis of the Si-Sio2 system

1957 • 27 citations

Cited By (0)

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