Back to search
Growth Kinetics Observed in the Formation of Metal Silicides on Silicon
Data up to Jan 2025
Published1972
Citations179
References7
Total Citations Per Year
Abstract
References (7)
Physics and technology of semiconductor devices
1967 • 2,850 citations
LOW-TEMPERATURE MIGRATION OF SILICON IN THIN LAYERS OF GOLD AND PLATINUM
1971 • 192 citations
Ohmic contacts to semiconductors
1969 • 153 citations
Metallurgical properties and electrical characteristics of palladium silicide-silicon contacts
1971 • 116 citations
Channeling-Effect Analysis of Thin Films on Silicon: Aluminum Oxide
1971 • 50 citations
Planar millimeter-wave epitaxial silicon Schottky-barrier converter diodes
1968 • 20 citations
Structure of Evaporated PtSi on Si
1970 • 19 citations
Cited By (0)
Loading...