Time-resolved reflectivity of ion-implanted silicon during laser annealing

Laser annealing of boron-implanted silicon

1978 • 223 citations

Thermal Conductivity, Electrical Resistivity, and Seebeck Coefficient of Silicon from 100 to 1300°K

1968 • 205 citations

Periodic regrowth phenomena produced by laser annealing of ion-implanted silicon

1978 • 167 citations

Spatially controlled crystal regrowth of ion-implanted silicon by laser irradiation

1978 • 164 citations

A laser-scanning apparatus for annealing of ion-implantation damage in semiconductors

1978 • 124 citations

Annealing of Te-implanted GaAs by ruby laser irradiation

1978 • 80 citations

Laser heating and melting of thin films on low-conductivity substrates

1975 • 60 citations

Dose dependence in the laser annealing of arsenic-implanted silicon

1978 • 38 citations

Reflectivity Enhancement of Semiconductors by Q-Switched Ruby Lasers

1968 • 33 citations